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High-speed 3D laser confocal microscope
NS3500 3D Confocal Laser Microscope
The NS-3500 is a high-speed confocal laser scanning microscope (CLSM) for reliable three-dimensional (3D) measurements. Real-time confocal microscopy images are achieved through a fast optical scanning module and signal processing algorithms. It has high-quality solutions in the measurement and inspection of microscopic 3D structures, such as semiconductor wafers, FPD products, MEMS devices, glass substrates, material surfaces, etc. 
Features & Benefits：
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High-resolution damage-free optical 3D measurement Automatic tilt compensation
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real-time confocal imaging Simple data analysis mode
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Various optical zooms Dual Z scan
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Large-scale splicing Feature Detection of Translucent Substrates
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Real-time CCD brightfield and confocal imaging No sample preparation
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auto focus
Software：
Application field：
The NS-3500 is a promising solution for measuring low-dimensional materials.
Measures the height, width, angle, area and volume of micron and submicron structures such as:
-Semiconductor: IC pattern, bump height, coil height, defect detection, CMP process
-FPD products: touch screen screen detection, ITO pattern, LCD column pitch height
- MEMS Devices: Structure 3D Profile, Surface Roughness, MEMS Patterns
-Glass Surface: Thin Film Solar Cell, Solar Cell Texture, Laser Pattern
-Materials Research: Die Surface Inspection, Roughness, Crack Analysis
Specification：
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Model |
Microscope NS-3500 |
Remark |
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Controller NS-3500E |
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Objective magnification |
10x |
20x |
50x |
100x |
150x |
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Observation/measurement range |
Level (H): μm |
1400 |
700 |
280 |
140 |
93 |
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vertical (V): μm |
1050 |
525 |
210 |
105 |
70 |
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The scope of work: mm |
16.5 |
3.1 |
0.54 |
0.3 |
0.2 |
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Numerical aperture(N.A.) |
0.30 |
0.46 |
0.80 |
0.95 |
0.95 |
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optical zoom |
x1 to x6 |
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total magnification |
178x to 26700x |
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Observation/Measurement Optical System |
Pinhole confocal optics |
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height measurement |
Measurement scan range |
fine scan : 400 μm (and/or) long scan : 10 mm [NS-3500-S] |
Note 1 |
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long scan : 10mm [NS-3500-T] |
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display resolution |
0.001 μm |
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repetition rate σ |
0.010 μm |
Note 2 |
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width measurement |
display resolution |
0.001 μm |
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repetition rate 3σ |
0.02 μm |
Note 3 |
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frame memory |
pixel |
1024x1024, 1024x768, 1024x384, 1024x192, 1024x96 |
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monochrome image |
12 bit |
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color image |
8-bit for RGB each |
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height measurement |
16 bit |
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Frame rate |
surface scan |
20 Hz to 160 Hz |
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line scan |
~8 kHz |
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automatic function |
auto gain |
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Laser confocal measurement light source |
wavelength |
405nm |
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output |
~2mW |
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Laser class |
Class 3b |
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laser receiver |
PMT (photomultiplier tube) |
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Optical observation light source |
lamp |
10W LED |
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Optical observation camera |
Imaging element |
1/2” Color image CCD sensor |
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Recording resolution |
640x480 |
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auto-adjust |
gain, shutter speed, White balance |
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data processing unit |
PC |
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power supply |
Voltage |
100 to 240 VAC, 50/60 Hz |
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current |
500 VA max. |
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weight |
microscope |
Approx. ~50 kg (Measuring head unit : ~12 kg) |
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controller |
~8 kg |
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Vibration isolation system |
Electronic vibration isolator |
Option |
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Dual scan mode for fine and long range scanners is only available for NS-3500-S (single lens type)。
Note 1: Fine scanning is performed by a piezoelectric actuator (PZT).
Note 2: 100 measurements were performed on a standard sample (1 μm step size) with a 100×/0.95 objective lens.
Note 3: 100 measurements were performed on a standard sample (5 μm spacing) with a 100×/0.95 objective.
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